Part Datasheet Search > Freescale > MPX5010 Datasheet PDF > MPX5010 Datasheet Pages 1/10
MPX5010Datasheet PDF
Page:
of 10 Go
If the format of the manual is confusing, please download and read the original PDF file.
1Motorola Sensor Device Data
" " !!# !
"
"# !"
"
The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon
pressure sensor designed for a wide range of applications, but particularly those
employing a microcontroller or microprocessor with A/D inputs. This patented, single
element transducer combines advanced micromachining techniques, thin–film metalliza-
tion, and bipolar processing to provide an accurate, high level analog output signal that
is proportional to the applied pressure.
Features
• 5.0% Maximum Error over 0° to 85°C
• Ideally Suited for Microprocessor or Microcontroller–Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element
• Temperature Compensated over
*
40° to +125°C
Figure 1. Fully Integrated Pressure Sensor Schematic
V
S
3
X–ducer
SENSING
ELEMENT
1
V
out
2
GND
THIN FILM
TEMPERATURE
COMPENSATION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
PINS 4, 5 AND 6 ARE NO CONNECTS
MAXIMUM RATINGS
(1)
Parametrics Symbol Value Unit
Overpressure
(2)
(P1 > P2) P
max
75 kPa
Burst Pressure
(2)
(P1 > P2) P
burst
100 kPa
Storage Temperature T
stg
–40 to +125 °C
Operating Temperature T
A
–40 to +125 °C
1. T
C
= 25°C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Senseon and X–ducer are trademarks of Motorola, Inc.
Order this document
by MPX5010/D
SEMICONDUCTOR TECHNICAL DATA
Motorola, Inc. 1997
INTEGRATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
0.2 to 4.7 V OUTPUT
PIN NUMBER
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
BASIC CHIP
CARRIER ELEMENT
CASE 867–08, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 867C–05, STYLE 1
1
2
3
V
out
Gnd
V
S
4
5
6
N/C
N/C
N/C
REV 2
Part Datasheet PDF Search
72,405,303 Parts Datasheet PDF, Update more than 5,000 PDF files ervery day.